Download Focused Ion Beam Systems: Basics and Applications by Nan Yao PDF

By Nan Yao

The concentrated ion beam (FIB) method is a crucial software for realizing and manipulating the constitution of fabrics on the nanoscale. Combining the program with an electron beam creates a DualBeam - a unmarried approach which may functionality as an imaging, analytical and pattern amendment device. offering the rules, services, demanding situations and purposes of the FIB procedure, this edited quantity comprehensively covers the ion beam expertise together with the DualBeam. the elemental rules of ion beam and two-beam structures, their interplay with fabrics, etching and deposition are all lined, in addition to in situ fabrics characterization, pattern instruction, three-d reconstruction and purposes in biomaterials and nanotechnology. With nanostructured fabrics turning into more and more vital in micromechanical, digital and magnetic units, this self-contained assessment of the diversity of ion beam equipment, their benefits, and whilst most sensible to enforce them is a priceless source for researchers in fabrics technological know-how, electric engineering and nanotechnology.

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To understand these experimental facts, a combined code of Monte Carlo (MC), diffusion, and molecular dynamics (MD) simulation codes were developed. In addition, it is necessary to localize defects when one fabricates nanostructures with a focused ion beam. Diffusion lengths were measured and an idea to localize the defects was presented. This chapter includes the above experimental and theoretical results. 2 Ion range and defect distributions An ion moving in matter loses its energy by the electronic and nuclear energy losses and finally stops after the travel of a certain path.

Measured damage cross sections for silicon single crystals irradiated with 200 keV/atom Auþ n clusters and found that the cross section varies roughly as n2 [27]. Shen et al. found a similar dependence in the case of Si irradiated with a fullerene ion [28]. These experimental results provide evidence for the existence of nonlinear spike effects in high-density collision cascades. The spike effect cannot be treated by the models based on BCA but can be done by MD simulation. Molecular-dynamics computer simulation study was made by Koster et al.

As the ions pass the second electrode, they are pulled outward, but since they are now closer to the axis and have more momentum, the change in direction is less than from the first impulse. 7 Schematic of a three-electrode electrostatic lens in an ion beam column. Field lines generated by the voltages on the electrodes are shown as dotted lines, and the ion trajectories traveling from left to right are in gray. passing the second field, the beam is once again constricted, but this time the ions are decelerated by the increasingly positive field to near their original velocity [14].

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